Thin film technologies for micro-opto-electro-mechanical system applications

Yi-Xin Chen

doi:10.1117/12.300639

20 February 1998 Thin film technologies for micro-opto-electro-mechanical system applications

Yi-Xin Chen

Proceedings Volume 3175, Third International Conference on Thin Film Physics and Applications; (1998) https://doi.org/10.1117/12.300639
Event: Third International Conference on Thin Film Physics and Applications, 1997, Shanghai, China

Abstract

The combination of micro-optics and integrated optics with microelectronics and micromechanics to create a broader class of micro-opto-electro-mechanical system (MOEMS), various thin films and related technologies such as the bulk and surface micromachining and LIG technology for the elementary structures and devices of MEOMS are discussed.

Citation Download Citation

Yi-Xin Chen "Thin film technologies for micro-opto-electro-mechanical system applications", Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); https://doi.org/10.1117/12.300639

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