Precise micromaterial processing by excimer laser ablation

Yoshiyuki Uchida; Jun Yamada; Shuntaro Higa; Yash P. Kathuria; Akihiko Tsuboi; Sigeo Watanabe; Niichi Hayashi; Hideo Furuhashi

doi:10.1117/12.345378

2 January 1998 Precise micromaterial processing by excimer laser ablation

Yoshiyuki Uchida, Jun Yamada, Shuntaro Higa, Yash P. Kathuria, Akihiko Tsuboi, Sigeo Watanabe, Niichi Hayashi, Hideo Furuhashi

Author Affiliations +

Proceedings Volume 3211, International Conference on Fiber Optics and Photonics: Selected Papers from Photonics India '96; (1998) https://doi.org/10.1117/12.345378
Event: International Conference on Fiber Optics and Photonics: Selected Papers from Photonics India '96, 1996, Madras, India

Abstract

An ablation wave from materials based on laser supported detonation and laser supported combustion has been created by exposing them with laser. The purpose of this study is to analyse the mechanism of the ablation wave using a high speed streaked camera and to realize more precise microprocessing by controlling the wave. The laser used in this experiment was an ultraviolet XeCl excimer laser of high photon energy with a wavelength of 308nm, a maximum pulse energy of 500mJ, a pulse width of 30ns and a maximum frequency of 50Hz. The high speed streaked camera had a resolving power of 100ps. Metal-ceramics functionally graded materials (FGMs) were selected as sample materials. An experimental system of laser microprocessing was constructed and the behavior of the ablation wave from FGMs were observed. The experimental results showed that the mechanism of the ablation wave from FGMs was a photochemical reaction with thermal interaction.

Citation Download Citation

Yoshiyuki Uchida, Jun Yamada, Shuntaro Higa, Yash P. Kathuria, Akihiko Tsuboi, Sigeo Watanabe, Niichi Hayashi, and Hideo Furuhashi "Precise micromaterial processing by excimer laser ablation", Proc. SPIE 3211, International Conference on Fiber Optics and Photonics: Selected Papers from Photonics India '96, (2 January 1998); https://doi.org/10.1117/12.345378

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