Prediction of CMOS transistor performance at 0.10-um gate length using tuned simulations

S. Sridhar; Manoj Mehrotra; Mark Rodder; Mahalingam Nandakumar; Ih-Chin Chen

doi:10.1117/12.284594

27 August 1997 Prediction of CMOS transistor performance at 0.10-μm gate length using tuned simulations

S. Sridhar, Manoj Mehrotra, Mark Rodder, Mahalingam Nandakumar, Ih-Chin Chen

Proceedings Volume 3212, Microelectronic Device Technology; (1997) https://doi.org/10.1117/12.284594
Event: Microelectronic Manufacturing, 1997, Austin, TX, United States

Abstract

Predictive device simulation is essential in order to improve MOSFET design, and reduce development time and costs. In this paper, the results of a simulation study carried out to predict the performance of N and P channel MOSFETs having a physical gate length of 0.10 micrometer at supply voltages of 1.2 and 1.5 V are presented. The study was used to determine the feasibility of the FOM goal for scaled 0.10 micrometer CMOS, and to identify the values of key device parameters [the external source drain resistance (Rext), poly-gate doping, etc.] which would improve device performance.

Citation Download Citation

S. Sridhar, Manoj Mehrotra, Mark Rodder, Mahalingam Nandakumar, and Ih-Chin Chen "Prediction of CMOS transistor performance at 0.10-μm gate length using tuned simulations", Proc. SPIE 3212, Microelectronic Device Technology, (27 August 1997); https://doi.org/10.1117/12.284594

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available