Effects of membrane curvature on the optical performance of the Mechanical Anti-Reflection Switch (MARS) modulator

Keith W. Goossen; James A. Walker; Dennis S. Greywall

doi:10.1117/12.284562

2 September 1997 Effects of membrane curvature on the optical performance of the mechanical antireflection switch (MARS) modulator

Keith W. Goossen, James A. Walker, Dennis S. Greywall

Author Affiliations +

Proceedings Volume 3226, Microelectronic Structures and MEMS for Optical Processing III; (1997) https://doi.org/10.1117/12.284562
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States

Abstract

The mechanical anti-reflection switch is an optical modulator based on the electrostatically induced vertical movement of a membrane above the substrate. Two basic types may exist, one where the membrane is insulating, wherein an electrode with an optical window is placed upon the membrane, and a second where the membrane is conducting, requiring no separate electrode. The first has the advantage that the region in the optical window is flat, but the disadvantage that since the window has no force applied to it, higher voltages are required for the same speed. We examine here the effects of membrane curvature on the optical performance of the second type.

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Keith W. Goossen, James A. Walker, and Dennis S. Greywall "Effects of membrane curvature on the optical performance of the mechanical antireflection switch (MARS) modulator", Proc. SPIE 3226, Microelectronic Structures and MEMS for Optical Processing III, (2 September 1997); https://doi.org/10.1117/12.284562

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