New software algorithm of 3D surface profile measurement based on phase-shift interfering technology

Bo Liu; Jianying Fan; Ling Yang; Qi-Shan Wang

doi:10.1117/12.304406

1 April 1998 New software algorithm of 3D surface profile measurement based on phase-shift interfering technology

Bo Liu, Jianying Fan, Ling Yang, Qi-Shan Wang

Proceedings Volume 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II; (1998) https://doi.org/10.1117/12.304406
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

In our profiler, software is the key-point. During the course of reference height of each point of the surface by computation and comparison of modulation M and so we can get surface profile. In the course of computation and comparison of modulation M, the ability of software will decide whether our profiler can be applied into practice. In this paper, we did some research work in software, and provided three- frame, five-frame and digited filer processing ways.

Citation Download Citation

Bo Liu, Jianying Fan, Ling Yang, and Qi-Shan Wang "New software algorithm of 3D surface profile measurement based on phase-shift interfering technology", Proc. SPIE 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II, (1 April 1998); https://doi.org/10.1117/12.304406

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