Laser-stimulated modification of the structure of silicon layers produced with the LCVD method

A. E. Dar'yushkin; S. B. Korovin; Vladimir I. Pustovoy

doi:10.1117/12.308624

26 May 1998 Laser-stimulated modification of the structure of silicon layers produced with the LCVD method

A. E. Dar'yushkin, S. B. Korovin, Vladimir I. Pustovoy

Proceedings Volume 3404, ALT'97 International Conference on Laser Surface Processing; (1998) https://doi.org/10.1117/12.308624
Event: ALT '97 International Conference on Laser Surface Processing, 1997, Limoges, France

Abstract

Based on the measured spectra of Raman scattering, we obtained the data concerning the modification of the microstructure of silicon film synthesized with the use of the LCVD (laser chemical vapor deposition) method on amorphous glass substrate. Appearance of a polycrystalline phase of silicon was observed when the initial amorphous film was irradiated with high-power light pulses of a CO₂ laser. Time resolved reflection spectra were measured for irradiating silicon films in situ. Was observed the polycrystalline film formation, moreover, films melting was not founded.

Citation Download Citation

A. E. Dar'yushkin, S. B. Korovin, and Vladimir I. Pustovoy "Laser-stimulated modification of the structure of silicon layers produced with the LCVD method", Proc. SPIE 3404, ALT'97 International Conference on Laser Surface Processing, (26 May 1998); https://doi.org/10.1117/12.308624

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available