Novel aspects in optics with interference coatings for medical excimer setup

Vladimir V. Novopashin; Elena A. Levchuk; Alexander V. Shestakov

doi:10.1117/12.332470

8 December 1998 Novel aspects in optics with interference coatings for medical excimer setup

Vladimir V. Novopashin, Elena A. Levchuk, Alexander V. Shestakov

Proceedings Volume 3430, Novel Optical Systems and Large-Aperture Imaging; (1998) https://doi.org/10.1117/12.332470
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

The results of obtaining and investigations coated optics in deep ultra violet (UV) at 193 nm are considered. For successful using in excimer lasers and medical systems the separate optical elements must provide either a good transmission for laser irradiation or enough high reflection. This can be achieved by anti-reflective (AR) or high- reflective (HR) interference coatings. Numerical design and obtaining of UV dielectric coatings are strongly influenced by the material properties in this wavelength region, that differ from those in visible and near infrared. The peculiarities for thin films in this region are: a limiting factor of the evaporation materials, homogeneous along the surface of optics, and high laser strength. The interaction between excimer laser photons and optical coatings can be determined as two combined process of high repetition rates and high energy densities. These processes influence both on substrate and on film. In this connection the investigations of optical properties of oxides (Al₂O₃, SiO₂) and fluoride (MgF2) films are observed. Besides some new aspects in investigation of pure substrates are obtained. All films were produced by electron-beam evaporation and ion-beam influence was analyzed as variation of optical absorption and laser damage threshold (LDT) of coated optics.

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Vladimir V. Novopashin, Elena A. Levchuk, and Alexander V. Shestakov "Novel aspects in optics with interference coatings for medical excimer setup", Proc. SPIE 3430, Novel Optical Systems and Large-Aperture Imaging, (8 December 1998); https://doi.org/10.1117/12.332470

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KEYWORDS

Ions

Optical coatings

Absorption

Magnesium fluoride

Excimer lasers

Autoregressive models

Fused quartz

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