Fast-ramp rapid vertical processor for 300-mm Si wafer processing

Cole Porter; Allan Laser; Robert Herring; Pradeep Pandey

doi:10.1117/12.324342

3 September 1998 Fast-ramp rapid vertical processor for 300-mm Si wafer processing

Cole Porter, Allan Laser, Robert Herring, Pradeep Pandey

Proceedings Volume 3507, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV; (1998) https://doi.org/10.1117/12.324342
Event: Microelectronic Manufacturing, 1998, Santa Clara, CA, United States

Abstract

Fast-ramp vertical furnace technology has been established on the 200-nm wafer platform providing higher capacity production, decreased cycle time and lower thermal budgets. Fast-ramp furnaces are capable of instantaneous temperature ramp rates up to 100 degrees C/min. This fast-ramp technology is now applied to 300-nm wafer processing on the SVG/Thermco Rapid Vertical Processor Vertical Furnace. 300- mm fast-ramp capability using the latest in real-time adaptive model based temperature control technology, Clairvoyant Control, is reported. Atmospheric Thermal Oxidation, LPCVD Nitride and Polysilicon Deposition, and LPCVD TEOS-based SiO2 Deposition results are discussed. 300- mm wafer Radial Delta Temperature dependence on temperature ramp rate, wafer pitch, and wafer support fixtures are discussed. Wafer throughput is calculated and reported. The Clairvoyant Control methodology of combining thermal, direct and virtually-sensed parameters to produce real-tim e estimation of wafer temperatures, thermal trajectory optimization, and feedback to minimize variations in film thickness and electrical properties is presented.

Citation Download Citation

Cole Porter, Allan Laser, Robert Herring, and Pradeep Pandey "Fast-ramp rapid vertical processor for 300-mm Si wafer processing", Proc. SPIE 3507, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV, (3 September 1998); https://doi.org/10.1117/12.324342

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available