Fabrication of ordered nanostructure based on anodic porous alumina

Hideki Masuda; Masashi Nakao; Toshiaki Tamamura; Hidetaka Asoh

doi:10.1117/12.324328

31 August 1998 Fabrication of ordered nanostructure based on anodic porous alumina

Hideki Masuda, Masashi Nakao, Toshiaki Tamamura, Hidetaka Asoh

Proceedings Volume 3511, Micromachining and Microfabrication Process Technology IV; (1998) https://doi.org/10.1117/12.324328
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

A highly ordered nanochannel array structure with high aspect ratios was fabricated based on the anodization of aluminum. A texturing treatment of the Al surface was carried out by nanoindentation process using the SiC mold initiated the development of an ideally-arranged-hole-array structure of anodic porous alumina. The hole-array has ideal hexagonal arrangement over millimeter dimensions, and the aspect ratio of the channel was over 150. In this report, the fabrication of the highly ordered nanochannel array and the application of the obtained structure to the preparation of nanostructures are described.

Citation Download Citation

Hideki Masuda, Masashi Nakao, Toshiaki Tamamura, and Hidetaka Asoh "Fabrication of ordered nanostructure based on anodic porous alumina", Proc. SPIE 3511, Micromachining and Microfabrication Process Technology IV, (31 August 1998); https://doi.org/10.1117/12.324328

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