Strategy to determine the constant of elasticity for static micromechanical structures with given shape

Mihaela Ilie; Hans-Dieter Liess; Nicolae Moldovan; Veit Meister; Sorin Nedelcu; Eugen Vasile; Aurel Vitriuc

doi:10.1117/12.324087

1 September 1998 Strategy to determine the constant of elasticity for static micromechanical structures with given shape

Mihaela Ilie, Hans-Dieter Liess, Nicolae Moldovan, Veit Meister, Sorin Nedelcu, Eugen Vasile, Aurel Vitriuc

Author Affiliations +

Proceedings Volume 3512, Materials and Device Characterization in Micromachining; (1998) https://doi.org/10.1117/12.324087
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

The aim of this work was to determine the constant of elasticity for a static silicon micromechanical structure with a given shape, having its width and length in the hundredths of micrometers range and its thickness in the micrometer domain, subject to torsion. This is done by experimentally studying the torsion vibration of the structure. On this purpose, test structures have been manufactured, with thickness varying in a certain domain. Special alignment marks have been used in order to align the structures with respect to the crystallographic directions of the silicon. The structures have been activated with acoustic waves. The resonance frequency in the torsion mode has been measured by means of an optical set-up. Successive measurements and etch-thinnings of the structures provided the dependency of the resonant frequency on the structure thickness. A theoretical formula expressing the resonance frequency fr in terms of the shear modulus G, thickness e, and damping coefficient γ has been fitted with the experimental points in order to obtain the values of G and g. The proportionality factor k between the activation force and the angular or linear displacement has been caluclated in terms of mechanical engineering. Considerations regarding the bending phenomenon complete the strategy to determine the constant of elasticity for arbitrary structures.

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Mihaela Ilie, Hans-Dieter Liess, Nicolae Moldovan, Veit Meister, Sorin Nedelcu, Eugen Vasile, and Aurel Vitriuc "Strategy to determine the constant of elasticity for static micromechanical structures with given shape", Proc. SPIE 3512, Materials and Device Characterization in Micromachining, (1 September 1998); https://doi.org/10.1117/12.324087

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