Micro-optical distance sensor fabricated by the LIGA process

Hajime Nakajima; Patrick Ruther; Juergen Mohr; Toshiro Nakashima; Kazuo Takashima; Teruo Usami

doi:10.1117/12.324264

2 September 1998 Micro-optical distance sensor fabricated by the LIGA process

Hajime Nakajima, Patrick Ruther, Juergen Mohr, Toshiro Nakashima, Kazuo Takashima, Teruo Usami

Proceedings Volume 3513, Microelectronic Structures and MEMS for Optical Processing IV; (1998) https://doi.org/10.1117/12.324264
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

An ultra-miniaturized sensor head for absolute measurement which has a size of less than 5 mm cube is realized. The sensor works by means of the optical triangulation. To achieve the optical function, the sensor consists of a three layer polymer waveguide patterned by X-ray lithography, an incoupling fiber and two detection fibers and micro cylindrical lenses which are also fabricated by X-ray lithography. The fibers and the cylindrical lenses are placed into the waveguide without any active alignment by using waveguide walls as guiding and fixing structures. The ratio of intensity detected in the two detection fibers is a measure for the distance between the object and the sensor. The detection range of the sensor is 1 to 6 mm between the sensor and an object with diffusively reflecting surface.

Citation Download Citation

Hajime Nakajima, Patrick Ruther, Juergen Mohr, Toshiro Nakashima, Kazuo Takashima, and Teruo Usami "Micro-optical distance sensor fabricated by the LIGA process", Proc. SPIE 3513, Microelectronic Structures and MEMS for Optical Processing IV, (2 September 1998); https://doi.org/10.1117/12.324264

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