Micromachined angular rate sensor MARS-RR

Wolfram Geiger; Martin Kieninger; Michael Pascal; Bernd Folkmer; Walter Lang

doi:10.1117/12.323886

8 September 1998 Micromachined angular rate sensor MARS-RR

Wolfram Geiger, Martin Kieninger, Michael Pascal, Bernd Folkmer, Walter Lang

Proceedings Volume 3514, Micromachined Devices and Components IV; (1998) https://doi.org/10.1117/12.323886
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

HSG-IMIT is developing a silicon rate gyroscope of small size, low cost, and high performance. The device is called MARS-RR, which means Micromachined Angular Rate Sensor with two Rotary oscillation modes. Latest measurements with first prototypes yielded random walk and bias stability as low as 0.14 deg/(root)h (1 (sigma) ) and 65 deg/h, respectively. The rate equivalent rms noise corresponds to a resolution of 0.05 deg/s in a bandwidth from 0 to 50 Hz. This performance is achieved by a new sensor design featuring decoupling of the driving and the detection mechanisms. Because of this decoupling mechanical and electromechanical crosstalk, the main sources of errors of micromachined gyros, can be reduced and therefore the zero rate output almost disappears. Despite the small sensor area of 6 mm² the detection capacitance amounts to about 3 pF. Thus subatomic deflections are detectable and a high sensitivity is achieved. MARS-RR was manufactured within the Bosch Foundry process and therefore it was possible for us to reduce the development time considerably.

Citation Download Citation

Wolfram Geiger, Martin Kieninger, Michael Pascal, Bernd Folkmer, and Walter Lang "Micromachined angular rate sensor MARS-RR", Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); https://doi.org/10.1117/12.323886

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