Vacuum maintenance in hermetically sealed MEMs packages

Alessio Corazza; Richard C. Kullberg

doi:10.1117/12.323921

8 September 1998 Vacuum maintenance in hermetically sealed MEMs packages

Alessio Corazza, Richard C. Kullberg

Proceedings Volume 3514, Micromachined Devices and Components IV; (1998) https://doi.org/10.1117/12.323921
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

Packages for many high sensitivity MEM devices (Micro- Electro-Mechanical devices) such as accelerometers need to operate in a vacuum in order to obtain their full performance. This vacuum is destroyed by the outgassing of species such as hydrogen and water vapor from the surfaces of the package exposed to this vacuum. To control this outgassing a getter is needed. MEM packages are too small to accommodate traditional sintered porous getters. A solution has been developed using a high porosity thick film getter material. The getter consists of a highly porous, mechanically stable, getter coating on a metal substrate. This getter reacts with active gases such as water vapor, hydrogen, oxygen, nitrogen, and carbon monoxide that outgas from the inner surfaces of the package. The physical characteristics and performance of this material will be demonstrated per ASTM sorption testing. The results of this testing will be used to demonstrate the potential for vacuum performance in a real world MEM package.

Citation Download Citation

Alessio Corazza and Richard C. Kullberg "Vacuum maintenance in hermetically sealed MEMs packages", Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); https://doi.org/10.1117/12.323921

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