Compatability of P+-GexSi1-x/p-Si heterojunction internal photoemission infrared detector with its monolithically integrated MOS readout switch

Ruizhong Wang; Peiyi Chen; Peihsin Tsien; Yongkang Li; Junming Zhou

doi:10.1117/12.318064

11 August 1998 Compatability of P⁺-Ge_xSi_1-x/p-Si heterojunction internal photoemission infrared detector with its monolithically integrated MOS readout switch

Ruizhong Wang, Peiyi Chen, Peihsin Tsien, Yongkang Li, Junming Zhou

Author Affiliations +

Proceedings Volume 3553, Detectors, Focal Plane Arrays, and Imaging Devices II; (1998) https://doi.org/10.1117/12.318064
Event: Photonics China '98, 1998, Beijing, China

Abstract

In this paper, the compatibility of P⁺-Ge_xSi_1-x/p-Si heterojunction internal photoemission IR detector (HIP IRD) with its CMOS readout circuit is analyzed with a feasible approach presented. The experimental chip in which P⁺-Ge_xSi_1-x/p-Si HIP IRD and its NMOS readout switch are monolithically integrated has been fabricated with a 3 micrometers NMOS technology. The MBE grown detector without the dielectric cavity and anti-reflecting layer has a blackbody detectivity D*_{(500, 1000, 1}) of 1.1 X 10⁹cmHz^1/2/W at the temperature of 77K. The selective readout of the output signals of the detectors through the NMOS readout switch at 77K has been achieved. Therefore, the feasibility of fabricating monolithically integrated P⁺-Ge_xSi_1-x/p-Si HIP IR focal plane array with NMOS readout circuit was demonstrated preliminarily.

Citation Download Citation

Ruizhong Wang, Peiyi Chen, Peihsin Tsien, Yongkang Li, and Junming Zhou "Compatability of P⁺-Ge_xSi_1-x/p-Si heterojunction internal photoemission infrared detector with its monolithically integrated MOS readout switch", Proc. SPIE 3553, Detectors, Focal Plane Arrays, and Imaging Devices II, (11 August 1998); https://doi.org/10.1117/12.318064

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available