Portable laser roughometer

Shihua Wang; Jun Wu

doi:10.1117/12.318404

10 August 1998 Portable laser roughometer

Shihua Wang, Jun Wu

Proceedings Volume 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II; (1998) https://doi.org/10.1117/12.318404
Event: Photonics China '98, 1998, Beijing, China

Abstract

A portable laser roughometer based on the principle of laser scattering on machined surface is described in this paper. The laser diode and novel telecentric optical system are adopted and the light-scattering band modulated from rough surface of sample is processed by the way of half scattering band of light. So, the measuring result is insensitivity to position of sample. The measuring range: Ra value from 0.005 micrometers to 2 micrometers . The contradictory between better measuring accuracy and larger measuring range is solved effectively. Besides, sample which has special form and internal surface can be measured with different accessories. The instrument is simple in structure and easy to handle. This noncontact measuring device also has sufficient measuring accuracy for practical uses.

Citation Download Citation

Shihua Wang and Jun Wu "Portable laser roughometer", Proc. SPIE 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II, (10 August 1998); https://doi.org/10.1117/12.318404

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