CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 3673 > Article
Open Access Paper
20 July 1999 CMOS integrated microsystems and nanosystems
Henry Baltes, Oliver Brand
Author Affiliations +
Proceedings Volume 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS; (1999) https://doi.org/10.1117/12.354257
Event: 1999 Symposium on Smart Structures and Materials, 1999, Newport Beach, CA, United States
Abstract
We review selected micro- and nano-systems developed recently at the Physical Electronics Laboratory of ETH Zurich using industrial CMOS technology in combination with post-processing micromachining and film deposition: (1) an infrared sensor microsystem for presence detection of persons, (2) calorimetric, capacitive, and gravimetric chemical sensor microsystems for detection of volatile organic compounds in air, and (3) a parallel scanning AFM chip. The microsystems combine sensor structures and read- out circuitry on a single chip.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Henry Baltes and Oliver Brand "CMOS integrated microsystems and nanosystems", Proc. SPIE 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS, (20 July 1999); https://doi.org/10.1117/12.354257
PROCEEDINGS
 9 PAGES
DOWNLOAD PAPER SAVE TO MY LIBRARY
GET CITATION
Lens.org Logo
CITATIONS
Cited by 2 scholarly publications.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Microsystems
Sensors
Polymers
CMOS sensors
Infrared sensors
Chemical analysis
Dielectrics
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top