New multicomponent oxide materials for thin film gas sensors

Toshihiro Miyata; Tadatsugu Minami

doi:10.1117/12.352810

12 July 1999 New multicomponent oxide materials for thin film gas sensors

Toshihiro Miyata, Tadatsugu Minami

Proceedings Volume 3675, Smart Structures and Materials 1999: Smart Materials Technologies; (1999) https://doi.org/10.1117/12.352810
Event: 1999 Symposium on Smart Structures and Materials, 1999, Newport Beach, CA, United States

Abstract

Cl₂ and O₃ gas detection at high sensitivity has been realized by newly developed thin-film gas sensors incorporating multicomponent oxides such as ZnO-In₂O₃, MgO-In₂O₃, and Zn₂In₂-MgIn₂O₄ systems. The sensors exhibited an increase in resistance with exposure to Cl₂ or O₃ gas. The sensing properties of the multicomponent oxide thin-film sensors were strongly dependent on the composition of the multicomponent oxide films used as well as the operating temperature. The highest sensitivity for Cl₂ and O₃ gases was obtained in sensors using a Zn₂In₂O₅- MgIn₂O₄ thin film prepared with Zn₂In₂O₅ contents of about 60 and 20 mol. percent respectively: Cl₂ gas detected at a minimum concentration of 0.01 and O₃ gas at 0.4ppm. A fast response as well as a high sensitivity were obtained in these sensors operated with alternating exposures in air and Cl₂ or O₃ gas. The resistivity, carrier concentration and Hall mobility of the thin-film sensors were measured under operation conditions using the van der Pauw method. It should be noted that a decrease or increase of resistivity in the thin-film sensors resulted from a simultaneously increase or decrease of both carrier concentration and Hall mobility. The increase in resistivity is attributed to the trapping of free electrons resulting from Cl₂ and O₃ being adsorbed on grain boundaries and/or the film surface, the same as that produced by adsorption of oxygen. A Zn₂In₂O₅- MgIn₂O₄ thin-film gas sensor exhibited very stable long term operation in an atmosphere with a high concentration of Cl₂ gas.

Citation Download Citation

Toshihiro Miyata and Tadatsugu Minami "New multicomponent oxide materials for thin film gas sensors", Proc. SPIE 3675, Smart Structures and Materials 1999: Smart Materials Technologies, (12 July 1999); https://doi.org/10.1117/12.352810

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