Conventional micromachining for microassembly applications

Ramona Eberhardt; A. Gebhardt; Torsten Scheller

doi:10.1117/12.341261

10 March 1999 Conventional micromachining for microassembly applications

Ramona Eberhardt, A. Gebhardt, Torsten Scheller

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341261
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

There is a growing demand for improvements in microassembly technology, especially in the area of high precision positioning. By observing the specific requirements of the micro world a spectrum of possibilities for the passive positioning supported by devices produced by conventional micromachining have been developed. By the experimental examination of different optical subassemblies an evaluation of the potentials of utilization of the passive positioning was carried out.

Citation Download Citation

Ramona Eberhardt, A. Gebhardt, and Torsten Scheller "Conventional micromachining for microassembly applications", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341261

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