MEMS for space applications

Linda M. Miller

doi:10.1117/12.341193

10 March 1999 MEMS for space applications

Linda M. Miller

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341193
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

Phenomenal advances in MicroElectroMechanical Systems (MEMS) performance has made this technology attractive for the development of micro- and nano-spacecraft. However, much work remains to be done. The space environment is harsh: extreme heat and cold, thermal cycling, radiation effects, and corrosive environments put conventional device designs at risk. Reliably, packaging and flight qualification methodologies need to be developed for MEMS to produce robust devices for a successful future in space micromissions. These issues are discussed in this paper, along with examples of micromissions, MEMS devices in development for space applications, and the ultimate in device integration: a system-on-a-chip.

Citation Download Citation

Linda M. Miller "MEMS for space applications", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341193

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