Nature and influence of surface layers and films on the chemical and electrochemical micromachining of NiTi shape memory alloys

David M. Allen; Sue A. Impey; Remi Robin; Tom T. Chen

doi:10.1117/12.341237

10 March 1999 Nature and influence of surface layers and films on the chemical and electrochemical micromachining of NiTi shape memory alloys

David M. Allen, Sue A. Impey, Remi Robin, Tom T. Chen

Author Affiliations +

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341237
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

Shape memory alloys are used in the manufacture of microactuators and stents. This paper discusses (1) the nature of the surface oxide layer on NiTi shape memory alloys; (2) its role in protecting the underlying base metal from chemical and electrochemical etchants; (3) how the oxide can be removed and;; (4) the necessity of rapid by- product removal from the metal-etchant interface to achieve even the etching of the underlying alloy.

Citation Download Citation

David M. Allen, Sue A. Impey, Remi Robin, and Tom T. Chen "Nature and influence of surface layers and films on the chemical and electrochemical micromachining of NiTi shape memory alloys", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341237

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available