Step-height and step-transition measurements with the heterodyne differential interferometer

D. V. Baranov; A. A. Egorov; Evgeny M. Zolotov; Konstantin K. Svidzinsky

doi:10.1117/12.340150

25 February 1999 Step-height and step-transition measurements with the heterodyne differential interferometer

D. V. Baranov, A. A. Egorov, Evgeny M. Zolotov, Konstantin K. Svidzinsky

Proceedings Volume 3736, ICONO '98: Quantum Optics, Interference Phenomena in Atomic Systems, and High-Precision Measurements; (1999) https://doi.org/10.1117/12.340150
Event: ICONO '98: Laser Spectroscopy and Optical Diagnostics: Novel Trends and Applications in Laser Chemistry, Biophysics, and Biomedicine, 1998, Moscow, Russian Federation

Abstract

The express method of determination of microstep parameters (height and width), based on the comparison of the complex simulated responses with the experimental one has been elaborated. A superresolution in determination of object lateral parameters is obtained using a priori information.

Citation Download Citation

D. V. Baranov, A. A. Egorov, Evgeny M. Zolotov, and Konstantin K. Svidzinsky "Step-height and step-transition measurements with the heterodyne differential interferometer", Proc. SPIE 3736, ICONO '98: Quantum Optics, Interference Phenomena in Atomic Systems, and High-Precision Measurements, (25 February 1999); https://doi.org/10.1117/12.340150

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