Novel scanning technique for ultraprecise measurement of topography

Ingolf Weingaertner; Michael Schulz; Clemens Elster

doi:10.1117/12.369198

11 November 1999 Novel scanning technique for ultraprecise measurement of topography

Ingolf Weingaertner, Michael Schulz, Clemens Elster

Proceedings Volume 3782, Optical Manufacturing and Testing III; (1999) https://doi.org/10.1117/12.369198
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

The ultra-precise manufacturing of surfaces needs ultra- precise characterization. A novel optical scanning technique for testing flats, aspheres and complex surfaces is presented which offers ultra-precision for the measurement of slope and topography. The scanning technique needs no external references; it is traced back exclusively to the units of angle and length. The technique is based on a combination of two principles, namely to perform difference measurements for slopes with large shears and to use only a single pentagon prism for the difference measurements, keeping the angular position of the pentagon prism constant in space. The combination of these two principles eliminates the influences of all first- and second-order errors of the facility. Whole- body movement of the artefact under test and distortion of the facility itself do not result in errors.

Citation Download Citation

Ingolf Weingaertner, Michael Schulz, and Clemens Elster "Novel scanning technique for ultraprecise measurement of topography", Proc. SPIE 3782, Optical Manufacturing and Testing III, (11 November 1999); https://doi.org/10.1117/12.369198

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