Comparison of optical and nonoptical methods for measuring surface roughness

Ivan Ohlidal; Miloslav Ohlidal; Daniel Franta; Miroslav Tykal

doi:10.1117/12.353100

14 July 1999 Comparison of optical and nonoptical methods for measuring surface roughness

Ivan Ohlidal, Miloslav Ohlidal, Daniel Franta, Miroslav Tykal

Proceedings Volume 3820, 11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics; (1999) https://doi.org/10.1117/12.353100
Event: Eleventh Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 1998, Stara Lesna, Slovakia

Abstract

The values of the basic characteristics of surface roughness measured by means of optical and non-optical methods often differ mutually. So far a systematic comparison of the results obtained by those methods has not been done. The results we have achieved comparing optical and non-optical methods of the surface roughness measurement for selected samples of rough surfaces and for selected methods are presented.

Citation Download Citation

Ivan Ohlidal, Miloslav Ohlidal, Daniel Franta, and Miroslav Tykal "Comparison of optical and nonoptical methods for measuring surface roughness", Proc. SPIE 3820, 11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, (14 July 1999); https://doi.org/10.1117/12.353100

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