Layer Generation For Devices And Integrated Circuits

Derek L. Lile

doi:10.1117/12.934976

8 November 1983 Layer Generation For Devices And Integrated Circuits

Derek L. Lile

Proceedings Volume 0387, Technology of Stratified Media; (1983) https://doi.org/10.1117/12.934976
Event: 1983 Los Angeles Technical Symposium, 1983, Los Angeles, United States

Abstract

Solid-state electronics is based on devices constructed from sequentially deposited layers of semiconductors, metals and insulators. This paper discusses some of the performance limiting parameters of such structures with particular attention being given to their surface and interfacial properties.

Citation Download Citation

Derek L. Lile "Layer Generation For Devices And Integrated Circuits", Proc. SPIE 0387, Technology of Stratified Media, (8 November 1983); https://doi.org/10.1117/12.934976

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