Miniature ultrasonic transducers with optical strain readout

Chung-Hoon Lee; Amit Lal

doi:10.1117/12.361266

2 September 1999 Miniature ultrasonic transducers with optical strain readout

Chung-Hoon Lee, Amit Lal

Proceedings Volume 3878, Miniaturized Systems with Micro-Optics and MEMS; (1999) https://doi.org/10.1117/12.361266
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

In this paper we demonstrate the use of diffractive gratings to optically measure strain in miniature ultrasonic transducers. Aluminum diffraction gratings were fabricated on silicon-microfabricated ultrasonic horns and beams which were actuated by bonded piezoelectric PZT (Lead-Zirconate Titanate) plates. A He-Ne laser beam was diffracted from the grating and a knife-edge was used to measure small changes in the diffraction angle as a result of time varying grating space and width. The measured strain and displacement profiles agreed with the expected mode patterns for the silicon resonators.

Citation Download Citation

Chung-Hoon Lee and Amit Lal "Miniature ultrasonic transducers with optical strain readout", Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); https://doi.org/10.1117/12.361266

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available