Paper
14 January 2000 Process analysis of boring with pulsed-laser irradiation
Tsunehisa Satake, Masato Watanabe, Kazuhiko Horioka, Makoto Shiho, Yoshimori Honkura
Author Affiliations +
Proceedings Volume 3887, High-Power Lasers in Civil Engineering and Architecture; (2000) https://doi.org/10.1117/12.375201
Event: Advanced High-Power Lasers and Applications, 1999, Osaka, Japan
Abstract
The boring process of various materials with KrF excimer laser was investigated by measurements of the penetration time. The parameters in this experiment were the frequency of the laser operation and the distance of the target from the laser focal point. The correlations between the penetration time and material properties such as density, thermal conductivity, coefficient of the thermal expansion, specific heat, Young's modulus and Poisson's ratio were obtained from this experiment. The penetration time was proportional to the logarithmic of the specific heat and that of the Young's modulus. Generally the target put at the focal point of the laser was penetrated most rapidly. But in the case of the quartz plate, the most rapidly penetrated point was quite in front of the laser focal point in spite of its less beam intensity.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tsunehisa Satake, Masato Watanabe, Kazuhiko Horioka, Makoto Shiho, and Yoshimori Honkura "Process analysis of boring with pulsed-laser irradiation", Proc. SPIE 3887, High-Power Lasers in Civil Engineering and Architecture, (14 January 2000); https://doi.org/10.1117/12.375201
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Excimer lasers

Quartz

Laser ablation

Glasses

Laser drilling

Laser irradiation

Pulsed laser operation

Back to Top