Microengineered open tubular columns for GC analysis

Goib Wiranto; Malcolm R. Haskard; Dennis E. Mulcahy; David E. Davey; Ernest F. Dawes

doi:10.1117/12.364435

29 September 1999 Microengineered open tubular columns for GC analysis

Goib Wiranto, Malcolm R. Haskard, Dennis E. Mulcahy, David E. Davey, Ernest F. Dawes

Proceedings Volume 3891, Electronics and Structures for MEMS; (1999) https://doi.org/10.1117/12.364435
Event: Asia Pacific Symposium on Microelectronics and MEMS, 1999, Gold Coast, Australia

Abstract

Microengineered open tubular (MOT) columns with semi rectangular cross-sections have been designed and fabricated using microengineering techniques. The creation of 100-micrometers wide, 20-micrometers deep, and 125-cm long columns employed isotropic etching on (100) silicon and anodic bonding with a Pyrex 7740 glass cover plate. Column geometry has been optimized to achieve maximum efficiency and allow extreme operating conditions. The walls of the microcolumns were coated with a non-polar liquid stationary phase. Performances of the MOT columns have been demonstrated by their ability to completely separate a series of hydrocarbon mixture in less than 1.25 min under isothermal condition of 150 degrees C. The achievable column efficiencies as measured in terms of theoretical plate height ranged from 0.57 to 1.45 mm, which agreed well with theoretical predictions.

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Goib Wiranto, Malcolm R. Haskard, Dennis E. Mulcahy, David E. Davey, and Ernest F. Dawes "Microengineered open tubular columns for GC analysis", Proc. SPIE 3891, Electronics and Structures for MEMS, (29 September 1999); https://doi.org/10.1117/12.364435

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