Defect printing issues with high-contrast chemically amplified resists

Zhijian G. Lu; Wayne M. Moreau; Xiaoming Yin; K. Rex Chen; Alan C. Thomas; Peggy Lawson; George M. Jordhamo; ChungHsi J. Wu

doi:10.1117/12.388284

23 June 2000 Defect printing issues with high-contrast chemically amplified resists

Zhijian G. Lu, Wayne M. Moreau, Xiaoming Yin, K. Rex Chen, Alan C. Thomas, Peggy Lawson, George M. Jordhamo, ChungHsi J. Wu

Author Affiliations +

Proceedings Volume 3999, Advances in Resist Technology and Processing XVII; (2000) https://doi.org/10.1117/12.388284
Event: Microlithography 2000, 2000, Santa Clara, CA, United States

Abstract

A special class of post-development defects, referred as Circular Surface Defects (CSDs), has been reported. Up to now, no resist is immune to CSD printing, including eight commercial KrF resists (from two vendors) and six early samples of ArF resists (from five vendors). An extensive study on the CSDs was conducted on a KrF Resist A, in term of its origin, formation and removal mechanism. Photoacid generators (PAGs) are proved to be a primary contributor to the CSDs. The origin of CSDs is believed to be PAG aggregation along with other hydrophobic components, resulting in formation of microemulsions in the developer. The aggregates have limited solubility in aqueous base developer, and could redeposit on the wafer surface during development. We propose one major defect removal mechanism, or 'Stripping' mechanism. This mechanism is related to resist film thickness loss, which aids in stripping potential defects from the resist surface, or reducing the probability of defect deposition.

Citation Download Citation

Zhijian G. Lu, Wayne M. Moreau, Xiaoming Yin, K. Rex Chen, Alan C. Thomas, Peggy Lawson, George M. Jordhamo, and ChungHsi J. Wu "Defect printing issues with high-contrast chemically amplified resists", Proc. SPIE 3999, Advances in Resist Technology and Processing XVII, (23 June 2000); https://doi.org/10.1117/12.388284

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available