Errors in projecting size control realized by laser scanning systems

Victor V. Tarasov; Yuri G. Yakushenkov

doi:10.1117/12.373651

29 December 1999 Errors in projecting size control realized by laser scanning systems

Proceedings Volume 4016, Photonics, Devices, and Systems; (1999) https://doi.org/10.1117/12.373651
Event: Photonics Prague '99, 1999, Prague, Czech Republic

Abstract

Due to inconstant velocity of movement of laser scanning beam in the plane of measuring as well as due to defocusing brought by the scanner there is possible the appearance of rather meaningful errors. Formulas and diagrams for these errors' calculations are derived.

Citation Download Citation

Victor V. Tarasov and Yuri G. Yakushenkov "Errors in projecting size control realized by laser scanning systems", Proc. SPIE 4016, Photonics, Devices, and Systems, (29 December 1999); https://doi.org/10.1117/12.373651

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