Microactuated optical MEMS

Hiroyuki Fujita

doi:10.1117/12.382261

10 April 2000 Microactuated optical MEMS (Abstract Only)

Hiroyuki Fujita

Proceedings Volume 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS; (2000) https://doi.org/10.1117/12.382261
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, Paris, France

Abstract

Optical scanners and switches are presented as examples of microactuated optical devices. Also a 3D chip-level packaging technique that is capable of optical, mechanical and electronic connections is discussed.

Citation Download Citation

Hiroyuki Fujita "Microactuated optical MEMS (Abstract Only)", Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); https://doi.org/10.1117/12.382261

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