Micro-optical devices in a Japanese national project

Kimihide Nakatsu; Naoki Mitsumoto; Kiyoshi Nemoto; Yuichi Ishikawa; Takayuki Hirano

doi:10.1117/12.397928

1 September 2000 Micro-optical devices in a Japanese national project

Kimihide Nakatsu, Naoki Mitsumoto, Kiyoshi Nemoto, Yuichi Ishikawa, Takayuki Hirano

Proceedings Volume 4075, Micro-Opto-Electro-Mechanical Systems; (2000) https://doi.org/10.1117/12.397928
Event: Symposium on Applied Photonics, 2000, Glasgow, United Kingdom

Abstract

This paper describes some aspects of micro optical devices under the Japanese national micromachine project. The national R&D project, Industrial Science and Technology Frontier Program Micromachine Technology, was inaugurated in 1991 as a ten-year project, and aims to establish a technological paradigm of micromachine throughout the multidisciplinary R&D. The final goal of our R&D is to establish following three practical applications: 1) advanced maintenance system for power plant, 2) microfactory and 3) intraluminal diagnostic and therapeutic system. For these systems, many functions such as visual inspections, contact pressure detection, wireless energy supplying and so on are required. We have developed novel micro optical devices such as 1) visual inspection devices; micro optical scanning sensor, micro stereoscope and micro camera, 2) optical pressure detection devices, 3) micro photon energy transmission device and 4) micro laser catheter, micro laser welding device and so on. We describe some topics of the micro optical devices as an outline of developed devices.

Citation Download Citation

Kimihide Nakatsu, Naoki Mitsumoto, Kiyoshi Nemoto, Yuichi Ishikawa, and Takayuki Hirano "Micro-optical devices in a Japanese national project", Proc. SPIE 4075, Micro-Opto-Electro-Mechanical Systems, (1 September 2000); https://doi.org/10.1117/12.397928

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