High-power second harmonic generation with free-running Nd:YAG slab laser for micromachining applications

Sebastian Favre; Thomas C. Sidler; Rene-Paul Salathe

doi:10.1117/12.405707

6 November 2000 High-power second harmonic generation with free-running Nd:YAG slab laser for micromachining applications

Sebastian Favre, Thomas C. Sidler, Rene-Paul Salathe

Author Affiliations +

Proceedings Volume 4088, First International Symposium on Laser Precision Microfabrication; (2000) https://doi.org/10.1117/12.405707
Event: First International Symposium on Laser Precision Microfabrication (LPM2000), 2000, Omiya, Saitama, Japan

Abstract

Frequency doubled Nd:YAG lasers represent an attractive alternative to other laser tools for many material processing applications, but frequency doubling with pulsed Nd:YAG lasers has been performed until now only with pulses of tens of nanoseconds. In material processing with longer pulses (10-1000 microsecond(s) ), such as encountered in typical 1.06 micrometers industrial Nd:YAG applications, the laser-material interaction is different and, in particular, higher material ablation rates are performed. Furthermore, the green light material processing permits a better focusability and a higher absorption in most materials. However, frequency doubling with long pulse lasers is much more difficult and less efficient up to now. The main problems are the generation of a fundamental 1.064 micrometers beam of high quality necessary for the non-linear process, and the low damage threshold of the non linear materials in the long pulse regime. Therefore, a zigzag slab laser, which has a high beam quality and an inherently linear polarization of the beam, is an ideal candidate for non-linear processes. The optical damage threshold in the non-linear materials is the main limiting parameter. The 140 W instantaneous power obtained for a 200 microsecond(s) pulse duration in extra-cavity configuration allows us to finely process sheets up to 200 micrometers thick.

Citation Download Citation

Sebastian Favre, Thomas C. Sidler, and Rene-Paul Salathe "High-power second harmonic generation with free-running Nd:YAG slab laser for micromachining applications", Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); https://doi.org/10.1117/12.405707

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