Investigations of transmittance and reflectance in the DUV/VUV spectral range

Puja Kadkhoda; Holger Blaschke; J. Kohlhaas; Detlev Ristau

doi:10.1117/12.405831

2 November 2000 Investigations of transmittance and reflectance in the DUV/VUV spectral range

Puja Kadkhoda, Holger Blaschke, J. Kohlhaas, Detlev Ristau

Proceedings Volume 4099, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries; (2000) https://doi.org/10.1117/12.405831
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

In the course of the rapid progress of DUV/VUV lasers and their employment in semiconductor lithography, micro material processing, and medical surgery systems, the characterization of optical components in this spectral region gains of increasing importance. The precise determination of the optical properties, such as reflectance (R) and transmittance (T), is essential for further progresses of the components. Currently, standardized procedures for measurement of R&T are described in the international standard draft ISO/WD 15368, which is optimized for the whole wavelength range above DUV. In the DUV/VUV spectral range, scatter losses caused by the surface and bulk of the components increase with decreasing wavelengths. This effect is not considered in the standardized measurement procedures for T and R. In this study, a spectral photometer device, which has been developed at Laser Zentrum Hannover, will be presented. The set-up allows measurements of total reflectance for a defined acceptance angle range. In the current state, the DUV.VUV-photometer covers a spectral range from 115nm up to 300nm. Investigations on the scatter behavior of optics for this spectral range indicate a need for precise separation between ordinary reflected or transmitted beam and scattered radiation on the test samples. The dependence of the R and T values on the collection angles will be illustrated.

Citation Download Citation

Puja Kadkhoda, Holger Blaschke, J. Kohlhaas, and Detlev Ristau "Investigations of transmittance and reflectance in the DUV/VUV spectral range", Proc. SPIE 4099, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries, (2 November 2000); https://doi.org/10.1117/12.405831

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