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25 August 2000 Bulk micromachining for sensors and actuators
Masayoshi Esashi
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Proceedings Volume 4174, Micromachining and Microfabrication Process Technology VI; (2000) https://doi.org/10.1117/12.396434
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
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Masayoshi Esashi "Bulk micromachining for sensors and actuators", Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); https://doi.org/10.1117/12.396434
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KEYWORDS
Actuators
Bulk micromachining
Sensors
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