Micromachined capacitive switches at microwave frequencies

Chee How Wong; M. J. Tan; Li Hui Guo; J.-M. Huang; Kim Miao Liew; Ai Qun Liu

doi:10.1117/12.395601

11 August 2000 Micromachined capacitive switches at microwave frequencies

Chee How Wong, M. J. Tan, Li Hui Guo, J.-M. Huang, Kim Miao Liew, Ai Qun Liu

Proceedings Volume 4175, Materials and Device Characterization in Micromachining III; (2000) https://doi.org/10.1117/12.395601
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

Both electrical and mechanical models, exemplified with a micromachined capacitive switch with simple bridge structure, accurately describing its electrical and mechanical characteristics are described in this paper. The electrical model is represented as a RLC circuit, while the mechanical model is represented as a fixed-fixed beam. The advantage of these models is that it is possible to pre-determine various characteristics, such as the switching time of micromachined capacitive switches, during the design stage. These models can be used to accurately design micromachined capacitive switches for microwave applications. An illustrated fabrication process is also discussed.

Citation Download Citation

Chee How Wong, M. J. Tan, Li Hui Guo, J.-M. Huang, Kim Miao Liew, and Ai Qun Liu "Micromachined capacitive switches at microwave frequencies", Proc. SPIE 4175, Materials and Device Characterization in Micromachining III, (11 August 2000); https://doi.org/10.1117/12.395601

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