Integration of waveguides for optical detection in microfabricated analytical devices

Joerg P. Kutter; Klaus B. Mogensen; Peter Friis; Anders M. Jorgensen; Nickolaj J. Petersen; Pieter Telleman; Joerg Huebner

doi:10.1117/12.395677

18 August 2000 Integration of waveguides for optical detection in microfabricated analytical devices

Joerg P. Kutter, Klaus B. Mogensen, Peter Friis, Anders M. Jorgensen, Nickolaj J. Petersen, Pieter Telleman, Joerg Huebner

Author Affiliations +

Proceedings Volume 4177, Microfluidic Devices and Systems III; (2000) https://doi.org/10.1117/12.395677
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

Buried optical channel waveguides integrated with a fluidic channel network on a planar microdevice are presented. The waveguides were fabricated using silica-on-silicon technology with the goal to replace bulk optical elements and facilitate various optical detection techniques for miniaturized total analysis systems or lab-on-a-chip systems. Waveguide structures with core layers doped with germanium were employed for fluorescence measurements, while waveguides with nitrogen- only doped core layers were used for absorbance measurements. By the elimination of germanium oxygen deficiency centers transmission of light down to 210nm was possible, allowing absorance measurements in the mid and far UV region (210 to 280nm), which is the region where a large number of different molecules absorb light. Robust, alignment-free microdevices, which can easily be hooked up to a number of light sources and detectors were used for fluorescence measurements of two dyes, fluorescein and Bodipy, and absorbance measurements of a stres-reducing drug, propranolol. The lowest detected concentrations were 250pM for fluorescein, 100nM for Bodipy and 12(mu) M for propranolol.

Citation Download Citation

Joerg P. Kutter, Klaus B. Mogensen, Peter Friis, Anders M. Jorgensen, Nickolaj J. Petersen, Pieter Telleman, and Joerg Huebner "Integration of waveguides for optical detection in microfabricated analytical devices", Proc. SPIE 4177, Microfluidic Devices and Systems III, (18 August 2000); https://doi.org/10.1117/12.395677

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available