Amorphous silicon crystallization by a long-pulse excimer laser

Paolo Di Lazzaro; Sarah Bollanti; Francesca Bonfigli; Francesco Flora; Gualtiero Giordano; Tommaso Letardi; Daniele Murra; Cheng En Zheng; Alessandro Baldesi

doi:10.1117/12.413991

25 January 2001 Amorphous silicon crystallization by a long-pulse excimer laser

Paolo Di Lazzaro, Sarah Bollanti, Francesca Bonfigli, Francesco Flora, Gualtiero Giordano, Tommaso Letardi, Daniele Murra, Cheng En Zheng, Alessandro Baldesi

Author Affiliations +

Proceedings Volume 4184, XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference; (2001) https://doi.org/10.1117/12.413991
Event: XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, 2000, Florence, Italy

Abstract

In this paper we summarise the results of the annealing of a-Si films done at ENEA Frascati by the XeC1 laser facility Hercules and the preliminary results of the characterisation work done on the first Italian industrial high-energy excimer laser, named Hercules L. Some information will be also given on a novel process to obtain homogeneous, large grain poly-Si and on a new homogeniser with zoom.

Citation Download Citation

Paolo Di Lazzaro, Sarah Bollanti, Francesca Bonfigli, Francesco Flora, Gualtiero Giordano, Tommaso Letardi, Daniele Murra, Cheng En Zheng, and Alessandro Baldesi "Amorphous silicon crystallization by a long-pulse excimer laser", Proc. SPIE 4184, XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, (25 January 2001); https://doi.org/10.1117/12.413991

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available