LIGA technology today and its industrial applications

Song-Jo Chung; Herbert Hein; Juergen Mohr; Franz Josef Pantenburg; Joachim Schulz; Ulrike Wallrabe

doi:10.1117/12.403702

11 October 2000 LIGA technology today and its industrial applications

Song-Jo Chung, Herbert Hein, Juergen Mohr, Franz Josef Pantenburg, Joachim Schulz, Ulrike Wallrabe

Proceedings Volume 4194, Microrobotics and Microassembly II; (2000) https://doi.org/10.1117/12.403702
Event: Intelligent Systems and Smart Manufacturing, 2000, Boston, MA, United States

Abstract

Microcomponents can be manufactured not only by silicon technologies, bu talso by many other technologies, e.g. precision engineering, laser ablation, microelectrodischarge, RIE and by the LIGA process. In this paper, the state of the art of the LIGA technology and its industrial applications are presented, which have been developed in recent years at the Forschungszentrum Karlsruhe. Related technologies are described as well. This includes the use of a sacrificial layer and an alternative process technology for the fabrication of mold inserts using conventional UV-lithography with the negative resist SU-8. With respect to applications of the LIGA technology, a brief introduction to their specific fabrication processes and their functionality is presented. These are microspectrometers, optical fiber connectors, cycloid gear systems, optical heterodyne receivers and micro-mechanical gyroscopes.

Citation Download Citation

Song-Jo Chung, Herbert Hein, Juergen Mohr, Franz Josef Pantenburg, Joachim Schulz, and Ulrike Wallrabe "LIGA technology today and its industrial applications", Proc. SPIE 4194, Microrobotics and Microassembly II, (11 October 2000); https://doi.org/10.1117/12.403702

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