Paper
3 October 2000 Single-particle size measurement by light-scattering method
Huijie Huang, Lixin Zou, Longlong Du, Yongkai Zhao, Dunwu Lu
Author Affiliations +
Proceedings Volume 4220, Advanced Photonic Sensors: Technology and Applications; (2000) https://doi.org/10.1117/12.401701
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China
Abstract
We have designed and constructed a white light optical sensor for optical particle counter (OPC). The optical system of the sensor is a right-angle scattering type optics. It consists of an illumination system and a collection system for scattered light. A large illuminating aperture angle of 24 degrees is obtained by applying an aplanatic singlet in the illumination system, and a large collecting aperture angle of +/- 44 degrees is achieved by a spherical mirror. With the two large apertures, high signal-to-noise ratio and good monotonic light scattering response have been gained.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Huijie Huang, Lixin Zou, Longlong Du, Yongkai Zhao, and Dunwu Lu "Single-particle size measurement by light-scattering method", Proc. SPIE 4220, Advanced Photonic Sensors: Technology and Applications, (3 October 2000); https://doi.org/10.1117/12.401701
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KEYWORDS
Light scattering

Particles

Optical sensors

Optical proximity correction

Atmospheric particles

Mirrors

Spherical lenses

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