Paper
10 October 2000 Calibration of angle function in angle-grid-based 2D-position measurement system
Ping Cai, Satoshi Kiyono, Wei Gao, Liangming Lin
Author Affiliations +
Proceedings Volume 4222, Process Control and Inspection for Industry; (2000) https://doi.org/10.1117/12.403914
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China
Abstract
In angle grid based 2D-position measurement system, building up an accurate correspondence between the angle and the coordinates for the angle grid is very important to ensure the final accuracy of the measurement system. This paper introduces a calibration method for the angle function so as to realize the software datum. After introduce the iteration calibration algorithm, the convergence of the algorithm is discussed in detail and is proved analytically. Digital simulation has confirmed the calibration algorithm.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ping Cai, Satoshi Kiyono, Wei Gao, and Liangming Lin "Calibration of angle function in angle-grid-based 2D-position measurement system", Proc. SPIE 4222, Process Control and Inspection for Industry, (10 October 2000); https://doi.org/10.1117/12.403914
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KEYWORDS
Calibration

Cadmium

Sensors

Computer simulations

Error analysis

Metrology

Electroluminescence

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