High microwave performance of InGaP/GaAs HBT with beryllium-doped base grown by solid source MBE

Pan Yang; Hai Qun Zheng; Lye Heng Chua; Yongzhong Xiong; Hong Wang; Kaladhar Radhakrishnan; Soon Fatt Yoon; Geok Ing Ng

doi:10.1117/12.405396

24 October 2000 High microwave performance of InGaP/GaAs HBT with beryllium-doped base grown by solid source MBE

Pan Yang, Hai Qun Zheng, Lye Heng Chua, Yongzhong Xiong, Hong Wang, Kaladhar Radhakrishnan, Soon Fatt Yoon, Geok Ing Ng

Proceedings Volume 4227, Advanced Microelectronic Processing Techniques; (2000) https://doi.org/10.1117/12.405396
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore

Abstract

In this paper, we report for the first time the design, fabrication and characterization of high microwave performance InGaP/GaAs HBTs with beryllium doped base grown by slid-source MBE. Our InGaP/GaAs HBTs have achieved typical f_T of 53 GHz and f_max of 40 GHz. These microwave performances are comparable to those of AlGaAs/GaAs with C-doped base and grown by MOCVD fabricated using similar process in our laboratory. Our results suggest that high performance InGaP/GaAs HBTs grown by solid-source MBE can be used for high volume production as in the case with their AlGaAs/GaAs HBT counterparts.

Citation Download Citation

Pan Yang, Hai Qun Zheng, Lye Heng Chua, Yongzhong Xiong, Hong Wang, Kaladhar Radhakrishnan, Soon Fatt Yoon, and Geok Ing Ng "High microwave performance of InGaP/GaAs HBT with beryllium-doped base grown by solid source MBE", Proc. SPIE 4227, Advanced Microelectronic Processing Techniques, (24 October 2000); https://doi.org/10.1117/12.405396

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available