Optimized layout generator for microgyroscope

Francis E.H. Tay; Shifeng Li; V. J. Logeeswaran; David C.K. Ng

doi:10.1117/12.404893

20 October 2000 Optimized layout generator for microgyroscope

Francis E.H. Tay, Shifeng Li, V. J. Logeeswaran, David C.K. Ng

Proceedings Volume 4230, Micromachining and Microfabrication; (2000) https://doi.org/10.1117/12.404893
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore

Abstract

This paper presents an optimized out-of-plane microgyroscope layout generator using AutoCAD R14 and MS Excel^TM as a first attempt to automating the design of resonant micro- inertial sensors. The out-of-plane microgyroscope with two degrees of freedom lumped parameter model was chosen as the synthesis topology. Analytical model for the open loop operating has been derived for the gyroscope performance characteristics. Functional performance parameters such as sensitivity are ensured to be satisfied while simultaneously optimizing a design objective such as minimum area. A single algorithm will optimize the microgyroscope dimensions, while simultaneously maximizing or minimizing the objective functions: maximum sensitivity and minimum area. The multi- criteria objective function and optimization methodology was implemented using the Generalized Reduced Gradient algorithm. For data conversion a DXF to GDS converter was used. The optimized theoretical design performance parameters show good agreement with finite element analysis.

Citation Download Citation

Francis E.H. Tay, Shifeng Li, V. J. Logeeswaran, and David C.K. Ng "Optimized layout generator for microgyroscope", Proc. SPIE 4230, Micromachining and Microfabrication, (20 October 2000); https://doi.org/10.1117/12.404893

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