Integrated microchip-based nanoelectrospray device for high-throughput mass spectrometry

Thomas N. Corso; Colleen K. Van Pelt; Sheng Zhang; Simon J. Prosser; Gary A. Schultz

doi:10.1117/12.427960

21 May 2001 Integrated microchip-based nanoelectrospray device for high-throughput mass spectrometry

Thomas N. Corso, Colleen K. Van Pelt, Sheng Zhang, Simon J. Prosser, Gary A. Schultz

Proceedings Volume 4265, Biomedical Instrumentation Based on Micro- and Nanotechnology; (2001) https://doi.org/10.1117/12.427960
Event: BiOS 2001 The International Symposium on Biomedical Optics, 2001, San Jose, CA, United States

Abstract

The emerging field of microfluidics may provide for the rapid, automated analysis of samples. Here we describe the microfabrication and operation of a nanoelectrospray device formed from the planar surface of a monolithic silicon substrate for electrospray mass spectrometry sample analysis at low nanoliter per minute flow rates. To generate a useful electrospray from a microchip, a high aspect ratio nozzle structure of small dimensions is required. Deep reactive ion etching technologies allow these high aspect ratio structures to be fabricated in parallel and are widely available for the etching of silicon.

Citation Download Citation

Thomas N. Corso, Colleen K. Van Pelt, Sheng Zhang, Simon J. Prosser, and Gary A. Schultz "Integrated microchip-based nanoelectrospray device for high-throughput mass spectrometry", Proc. SPIE 4265, Biomedical Instrumentation Based on Micro- and Nanotechnology, (21 May 2001); https://doi.org/10.1117/12.427960

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