Time-resolved study of femtosecond microfabrication in silica glass

Hiroaki Misawa; Saulius Juodkazis; Andrius Marcinkevicius; Mitsuru Watanabe; Vygantas Mizeikis; Shigeki Matsuo

doi:10.1117/12.432501

29 June 2001 Time-resolved study of femtosecond microfabrication in silica glass

Hiroaki Misawa, Saulius Juodkazis, Andrius Marcinkevicius, Mitsuru Watanabe, Vygantas Mizeikis, Shigeki Matsuo

Proceedings Volume 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI; (2001) https://doi.org/10.1117/12.432501
Event: Photonics West 2001 - LASE, 2001, San Jose, CA, United States

Abstract

We report investigation of light-induced damage threshold (LIDT) in purified silica (transmission band down to 160 nm) by 350 fs laser pulses at the wavelength of 795 nm and 498 nm. Focusing a single pulse by a high numeric aperture NA equals 1.35 microscope objective lens results in one of the lowest single-show bulk LIDT values reported so far, 5 J/cm², while the surface ablation threshold is 2.5 J/cm² with both values being well below the critical self-focusing power in silica. Furthermore, we report the peculiarities of damage by two-pulse irradiation (duration experimental data and numeric simulation, which takes into account optical free-carrier generation and relaxation, demonstrates that these processes can explain the measured self-focusing, super-continuum generation, and light-induced damage threshold values. We argue that use of high numeric aperture objective, despite substantial temporal pulse stretching, results in tight focusing which is capable of overcoming the beam self-focusing, and the resulting fabrication quality is comparable to that obtained using shorter pulses.

Citation Download Citation

Hiroaki Misawa, Saulius Juodkazis, Andrius Marcinkevicius, Mitsuru Watanabe, Vygantas Mizeikis, and Shigeki Matsuo "Time-resolved study of femtosecond microfabrication in silica glass", Proc. SPIE 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, (29 June 2001); https://doi.org/10.1117/12.432501

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