Metrology-based control and profitability in the semiconductor industry

Charles Weber

doi:10.1117/12.429358

5 June 2001 Metrology-based control and profitability in the semiconductor industry

Charles Weber

Proceedings Volume 4275, Metrology-based Control for Micro-Manufacturing; (2001) https://doi.org/10.1117/12.429358
Event: Photonics West 2001 - LASE, 2001, San Jose, CA, United States

Abstract

This paper summarizes three studies of the semiconductor industry conducted at SEMATECH and MIT's Sloan School of Management. In conjunction they lead to the conclusion that rapid problem solving is an essential component of profitability in the semiconductor industry, and that metrology-based control is instrumental to rapid problem solving. The studies also identify the need for defect attribution. Once a source of a defect has been identified, the appropriate resources--human and technological--need to be brought into the physically optimal location for corrective action. The Internet is likely to enable effective defect attribution by inducing collaboration between different companies.

Citation Download Citation

Charles Weber "Metrology-based control and profitability in the semiconductor industry", Proc. SPIE 4275, Metrology-based Control for Micro-Manufacturing, (5 June 2001); https://doi.org/10.1117/12.429358

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