New approach for response surface methodology

Alexander A. Kouleshoff; Vladislav V. Nelayev

doi:10.1117/12.417686

1 February 2001 New approach for response surface methodology

Alexander A. Kouleshoff, Vladislav V. Nelayev

Proceedings Volume 4348, Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering; (2001) https://doi.org/10.1117/12.417686
Event: Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, 2000, St. Petersburg, Russian Federation

Abstract

Modified Response Surface Methodology (MRSM) is proposed for the approximation of numerical simulation results. This approach is based on the parametric statistics methods. The tensor products or Chebyshev's polynomials are used for the non-linear regression series in order to decrease the mean- square error. The MRSM algorithm is realized via Mathematica^R package. Results of investigations are proved on the basis of numerical simulation of the integrated circuit technology and analysis of the experimental data for thin film technology.

Citation Download Citation

Alexander A. Kouleshoff and Vladislav V. Nelayev "New approach for response surface methodology", Proc. SPIE 4348, Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, (1 February 2001); https://doi.org/10.1117/12.417686

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