Tracing back radius of curvature and topography to the base unit of length with ultraprecision

Ingolf Weingaertner; Michael Schulz; Ralf D. Geckeler; Otto Jusko; Michael Neugebauer; Arnold Nicolaus; Gerhard Boensch

doi:10.1117/12.445618

22 October 2001 Tracing back radius of curvature and topography to the base unit of length with ultraprecision

Ingolf Weingaertner, Michael Schulz, Ralf D. Geckeler, Otto Jusko, Michael Neugebauer, Arnold Nicolaus, Gerhard Boensch

Proceedings Volume 4401, Recent Developments in Traceable Dimensional Measurements; (2001) https://doi.org/10.1117/12.445618
Event: Lasers in Metrology and Art Conservation, 2001, Munich, Germany

Abstract

Very recently, in the context of measuring aspheres and complex surfaces with ultra-precision, a particular measurement principle was developed which determines the form (topography) of extended test samples by scanning measurements of curvature, being the reciprocal of the radius of curvature. The curvature sensor must be traceably calibrated with a low uncertainty. This back tracing can be done, first, by measuring radius of full spheres with a highly accurate sphere interferometer, second, by measuring roundness with highly accurate methods, and third, by measuring specially designed calibration aspheres. These procedures for traceably calibrating the curvature sensor will be described.

Citation Download Citation

Ingolf Weingaertner, Michael Schulz, Ralf D. Geckeler, Otto Jusko, Michael Neugebauer, Arnold Nicolaus, and Gerhard Boensch "Tracing back radius of curvature and topography to the base unit of length with ultraprecision", Proc. SPIE 4401, Recent Developments in Traceable Dimensional Measurements, (22 October 2001); https://doi.org/10.1117/12.445618

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