Electromechanical stability of capacitive transducers

Aarne S. Oja; Jukka M. Kyynarainen; Heikki Seppa

doi:10.1117/12.425379

5 April 2001 Electromechanical stability of capacitive transducers

Aarne S. Oja, Jukka M. Kyynarainen, Heikki Seppa

Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425379
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France

Abstract

The stability of micromechanical capacitive transducers depends on the stability of mechanical and electrical properties. Charges trapped on the native oxide layers of the micromechanical electrodes, can create significant electrostatic forces in the absence of an external biasing voltage. The amount of trapped charges fluctuate in time due to various tunneling processes and deteriorate long-term stability of capacitive MEMS sensors. We have investigated the electromechanical stability of commercial angular velocity sensors and low-g accelerometers and found drift rates on the order of 0.01 %/h even after several hours after a step in the bias voltage. After correcting for the drift due to charge tunneling using an empirical fitting functions we find mechanical stabilities in the level of ppm/h.

Citation Download Citation

Aarne S. Oja, Jukka M. Kyynarainen, and Heikki Seppa "Electromechanical stability of capacitive transducers", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); https://doi.org/10.1117/12.425379

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