Replication of refractive micro-optomechanical components made with deep lithography with protons

Patrik Tuteleers; Pedro Vynck; Heidi Ottevaere; Christof Debaes; Alex Hermanne; Irina P. Veretennicoff; Hugo Thienpont

doi:10.1117/12.425343

5 April 2001 Replication of refractive micro-optomechanical components made with deep lithography with protons

Patrik Tuteleers, Pedro Vynck, Heidi Ottevaere, Christof Debaes, Alex Hermanne, Irina P. Veretennicoff, Hugo Thienpont

Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425343
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France

Abstract

Deep Lithography with Protons (DLP) is a rapid prototyping technology for the fabrication of 3D micro-optical precision components. In this paper we will demonstrate how we made this DLP technology compatible with commercially available injection-molding and vacuum casting techniques, allowing to mass-replicate high-quality micro-optical modules at low cost. We will illustrate our technology by presenting optical characteristics of different refractive components made in optical-grade plastics such as polymethyl-methacrylate (PMMA), polycarbonate (PC) and semiconductor compatible plastics with high glass-transition temperatures such as COC.

Citation Download Citation

Patrik Tuteleers, Pedro Vynck, Heidi Ottevaere, Christof Debaes, Alex Hermanne, Irina P. Veretennicoff, and Hugo Thienpont "Replication of refractive micro-optomechanical components made with deep lithography with protons", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); https://doi.org/10.1117/12.425343

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