Laser micromachining for Ag ion exchanged glasses

Tadashi Koyama; Keiji Tsunetomo; Kenji Kamada; Kenichi Nakama

doi:10.1117/12.456857

25 February 2002 Laser micromachining for Ag ion exchanged glasses

Tadashi Koyama, Keiji Tsunetomo, Kenji Kamada, Kenichi Nakama

Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456857
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore

Abstract

Machining properties of Ag containing glasses (ACG) using KrF excimer laser and femtosecond laser are reported. Ag ions in the ACG are effective to prevent cracking and chipping during the laser machining. A 4x4 hole array fabricated by KrF excimer laser onto an ACG has good uniformity of hole diameter, d(ave) equals 129.9um and (sigma) equals 0.8um. V- and U- grooves are fabricated on ACG using a Ti:Al₂O₃ laser irradiation. The cross- sectional shape is controlled by Ag ion concentration in ACG.

Citation Download Citation

Tadashi Koyama, Keiji Tsunetomo, Kenji Kamada, and Kenichi Nakama "Laser micromachining for Ag ion exchanged glasses", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); https://doi.org/10.1117/12.456857

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